Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

PDF) Nonequilibrium water permeation in SiO2 thin films

Nanomaterials, Free Full-Text

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Table 4 from Optimization of plasma-enhanced chemical vapor deposition silicon oxynitride layers for integrated optics applications

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Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

PDF] Moisture Resistance of Insulating Films for Compound Semiconductor Devices

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Table 5 from Optimization of plasma-enhanced chemical vapor deposition silicon oxynitride layers for integrated optics applications

Table 1 from Gas permeation in silicon-oxide / polymer ( SiO x / PET ) barrier films : role of the oxide lattice , nano-defects and macro-defects

PDF) Rapid Reversible Degradation of Silicon Thin Films by a Treatment in Water

Conformal growth and characterization of hafnium silicate thin film by MOCVD using HTB (hafnium tertra-tert-butoxide) and TDEAS (tetrakis-diethylamino silane)

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