High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect
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Micromachines, Free Full-Text
Micromachines, Free Full-Text
Micromachines, Free Full-Text
Enhanced metal assisted etching method for high aspect ratio
Fabrication of high-aspect ratio silicon nanopillars for
Micromachines, Free Full-Text
Glass based micro total analysis systems: Materials, fabrication
Micromachines, Free Full-Text
Enhanced metal assisted etching method for high aspect ratio
Optimization of deep reactive ion etching for microscale silicon
Micromachines, Free Full-Text
Micromachines, Free Full-Text
Micromachines, Free Full-Text
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