Materials, Free Full-Text
4.8 (80) In stock
In the present study, the properties of Cu(Ag) alloy films were studied to evaluate their potential use as an alternate material for interconnection in hybrid bonding. Thin alloy films of Cu(Ag) were deposited by pulsed electrochemical deposition (PED) using a sulfuric acid-based bath, rotating disk electrode, and hot entry. Secondary ion mass spectrometry (SIMS) was used to measure the silver content of the films, with us finding that it decreases with increasing duty cycle. Thereafter, bright field scanning transmission electron microscope (STEM) imaging in combination with energy-dispersive x-ray spectroscopy (EDS) was used to visualize the thin film microstructure and to confirm the uniform distribution of silver throughout the film, with no bands being seen despite the pulsed nature of the deposition. Film resistance was measured by a four-point probe to quantify the impact of Ag content on resistivity, with us finding the expected linear relationship with the Ag content in the film. Furthermore, the coefficient of thermal expansion (CTE) of the films was measured using X-ray diffraction, and modulus and hardness were measured via nanoindentation, revealing linear dependences on the Ag content as well. Notably, the addition of 1.25 atom% Ag resulted in a significant increase in the CTE from 17.9 to 19.3 ppm/K, Young’s modulus from 111 to 161 GPa, and film hardness from 1.70 to 3.99 GPa. These simple relationships offer a range of properties tunable via the duty cycle of the pulsed plating, making Cu(Ag) a promising candidate for engineering wafer-to-wafer metal interconnections.
Materials, Free Full-Text, Carbon Felt
Materials, Free Full-Text, gold digging ants
Materials, Free Full-Text, passfeder 5mm
Materials An Open Access Journal from MDPI
Materials, Free Full-Text, super surf 1.99
Materials, Free Full-Text, super surf 1.99
Materials, Free Full-Text, super surf 1.99
Materials, Free Full-Text, Carbon Felt
Materials, Free Full-Text, Heat Transfer
PATTERNS: Concrete Metals TYPES OF HEADINGS COVERED BY THE PATTERN: Headings For Individual Materials, PDF, Wear
Materials, Free Full-Text, Heat Transfer
Materials, Free Full-Text, test brain 140
Materials, Free Full-Text, super surf 1.99
Materials, Free Full-Text, morenting auto spray
Table of Contents - June 6, 1968
Vanity Fair Womens Beyond Comfort Full Coverage Wireless Bra 72282 - DAMASK NEUTRAL - 40C
Shop Back and Side Smoothing Bra: Back Appeal™ Underwire Bra
Glamorise Womens Magiclift Cotton Support Wirefree Bra 1001 White 46b : Target
Vanity Fair Womens Beyond Comfort Full Coverage Wireless Bra
- Gossard Women's Bodysuit, Black, 32FF at Women's Clothing store
- Aozora Yoga Mat Bag Large Yoga Mat Tote Sling Carrier with Pockets Fits Mats with Multi-Functional Storage Pockets Light and Durable
- How to Perform in Your Mascot Costume from Olympus
- Best Golf Pants for Women - C.Style
- ML120 LED ELITE White Premium 120mm PWM Magnetic Levitation Fan
- Jockey Sports bra padded zipper front Small Pink 50369